Precise Lift-off Metallization
Served for:
- Optoelectronic devices
- Semiconductor
- LED‘s
- III-V applications
To perform precise metallization lift-off, an evaporation system with a long throw distance, high repeatability, and uniformity is essential.
The PROVAC PRO 500 is a very cost effective evaporator ideal for special R&D and pilot production projects. The PRO 500 has excellent repeatability able to coat a metal layer with a uniformity of < 1% on a 4” substrate, with a coating angle between 87° and 90° over the substrate, within the dome. This angle is absolutely necessary to produce structures with a line width of <0.5 μm.
PROVAC Balzes, Liechtenstein
Oestrich-Winkel, Germany
