Thin Pure Silicon on ceramic substrate
Optimized footprint requires minimum floor space
Double load lock system offers highest throughput
Fully automatic handling from cassette to cassette
Manual version available
State of the art PC control offers highest reproducibility
Maintenance friendly system configuration
Excellent service and support
EU conformity
Served for:
- SAW Filters
- Solar cells
PROVAC serves the worldwide market specializing in thin pure silicone layers made by precise sputtering processes. Customized applications for SAW devices and solar cells.
