The Pro Series High Vacuum PVD Coating System is Provac‘s solution for applications in the fields of precision optics, ophthalmics and semiconductor industry. Its design allows the production of thin film coatings on various substrate materials using a wide range of coating materials. The systems are best suited for laboratory, pilot and mass production of single and multilayer, metallic and dielectric coatings.
The versatile, fully automatic evaporation (i.e. PVD or PVD-IAD) cubic batch coating system with a calotte diameter of 500 mm to 2000 mm can be equipped according to the customer applicaton with all requested accessories as heaters, substrate holders, evaporation and ion sources, etc. The basic system consists of a water heated/cooled chamber and door including rotary drive, water battery on frame and power rack. The fully automatic PC control ensures an operator friendly control. The system can be equipped with either cryo, turbo molecular oil diffusion high vacuum pump and a standard or dry forevacuum pump set including vacuum pressure monitoring.
– Customized substrate holder
– Calotte and/or quartz radiant substrate heater
– Resistively heated and/or e-beam evaporation devices, incl. pneumatic shutters
– Evaporation rate and layer thickness monitor
– Ion assistance deposition (IAD) devices
– Optical monitoring system on request
Our total commitment to the PRO evaporation platforms meets the challenge of non-stop innovation to meet R&D, pilot and mass production demands.
Provac offers a very extensive line of proven systems and processes for the Optics, Ophthalmic, Microelectronic, Photovoltaic and Semiconductor industries. The needs and requirements related to each application are implemented into the development and production of the machines. This close cooperation with our customers enables PROVAC to develop customized problem solutions. Great emphasis is placed on reproducibility and high yields based on advanced control concepts.